A conventional route to scalable morphology-controlled regular structures and their superhydrophobic/hydrophilic properties for biochips application.

We use a conventional and straightforward route to fabricate scalable morphology-controlled regular structures. This route is based on the etching of PDMS microlens array in CF4 and CF4/O2 plasma. PDMS microlens array can be changed to regularly isolated microdot structures array in CF4 plasma. Microbowl shaped structures array can be reached in CF4/O2 plasma. Moreover, a set of structures after CF4 plasma treatment display superhydrophobicity, while a set of structures after CF4/O2 plasma treatment present hydrophilicity. DNA molecules can be readily enriched on the hydrophilic surface. We believe that the regular structure array surfaces provide a useful inspiration towards biomolecular detection and transportation in biochips.